The application scope of dust-free cloth is very wide, and only the relatively high cleanliness requirements will be used, for example, LCD assembly, or some surface cleaning, etc.

Cleanrooms are divided into many levels depending on the degree of cleanliness

At present, most of the clean room grades of semiconductor processing and panel assembly plants are mostly Class 1000 and Class 100.

The smaller the number, the higher the cleanliness level

The concept of level 1000 is that no more than 1,000 dust particles per cubic foot can be greater than or equal to 0.5.

The concept of level 100 is that no more than 100 dust particles per cubic foot can be greater than or equal to 0.3.

Note that the size of the particles controlled by each level is different

According to the standards issued by the Federal Government of the United States [Federal Atandard (FS) 209E, 1992], clean rooms can be classified into six levels. They are Grade 1, Grade 10, Grade 100, Grade 1000, Grade 10000, Grade 100000. If the grade of the clean room is only described by the number of dust particles, it can be assumed that the dust particle size is not 0.5 um. The cleanroom grade should be Expressed in the order of a particular dust particle size. For example: Grade 10 at 0.2um (dust size at 0.2um or greater, density no greater than 75/cubic foot), Grade 1 at 0.1um (dust size at 0.1um or greater, density not greater than 35 / Cubic Feet). The cleanliness of clean rooms required for integrated circuit manufacturing must be better than 1000.

Clean Room Grade, Clean Room Standard, Clean Room Standard Definition

First, the definition of clean room

The dust, pressure, temperature, humidity, air flow distribution and speed in the air are controlled within a certain range of space. The dust here refers to dust that is invisible to the naked eye and

Particles, and dust that cannot be completely removed by a general air cleaner.

Cleanrooms are generally divided into Industraial Cleanroom (ICR) for electronics and precision industries, and BiologicalCleanRoo for the pharmaceutical and food industries that need to control microbial concentrations.

(BCR).

Second, the federal standard clean room rating

Nowadays, most of the Federal Standards (US Federal Standard 209b) formulated by the United States are adhered to, and BCRs mostly refer to the NASA specifications that specify biological particle limit values ​​(American Airlines

Agency 5340.2 specifications).

Its Fed.std cleanness is expressed as: 1 ft3 of air, containing 0.5 micron (micro) or more micro-particles, and is called [grade â—‹ â—‹]. For example: air contains 10 0.5

In the following, it is indicated as "Level 10". Two natural atmospheres usually contain 300,000 to 30,000,000 particles.

Third, in the JIS standard, clean room cleanliness, is divided into 8 levels

The general cleanliness refers to the cleanliness of the air and is divided into grades 1, 2 • • • 8, 8 stages. In 1 cubic meter of air, dust with a particle size of 0.1 micron is less than 10

1; below 100 is 100=102 is level 2; below 1000 is 1000=103 level 3, and so on.

21 The world, the development of the most advanced industries, has accelerated the transformation of the industrial structure, and the necessity for the establishment of clean rooms has also been relatively improved. The increasing miniaturization and precision of commodities, dust and temperature and humidity

The change also caused great harm to the completion of the product, resulting in low quality. With the high quality requirements of the products, the demand for environmental cleanliness is also increasing. So in a clean room

The use of dust-proof materials and commodities are particularly important.

The so-called clean room is a man-made environment containing particles far below the general environment. With the rapid growth of the number of integrated circuits, it also increases the cleanliness requirements of the manufacturing environment (clean room) in the industry. Even if the size of the particles is desired to be less than 0.1 μm, the operation of the product may be hindered or its life may be reduced. Better than the rise of nanotechnology, resulting in the continuous shrinkage of semiconductor critical dimensions, integrated circuit accumulation continues to increase, dust particles more easily make the chip failure or reliability deterioration. For example, when the metal dust particles fall on the metal wire, it may cause the metal wire to form a short circuit. In addition, if an acidic ionic compound dust particles fall on the metal wire, it may corrode, so the clean room is an indispensable element of integrated circuit manufacturing.

Clean room standard, cleanroom standard

First, the Clean Room is also called a clean room or a clean room.

“Dustless workshop” refers to the removal of particulates, harmful air, bacteria, and other contaminants in the air within a certain space range, and the indoor temperature, humidity, cleanliness, indoor pressure, airflow velocity and airflow distribution, noise and vibration And the lighting and static electricity are controlled within a certain range of requirements and given to specially designed rooms. That is, no matter how the external air conditions change, the interior of the room can all have the properties of maintaining the previously set requirements such as cleanliness, temperature, humidity and pressure.

The most important role of the clean room is to control the cleanliness, temperature and humidity of the atmosphere that the product is exposed to, so that the product can be produced and manufactured in a good environment. This space is called a “dust free workshop”.

Second, clean room standard - grade

US Federal Standard 209E (1992) PC/ft3

Cleanliness level particle size (um)

0.1 0.2 0.3 0.5 5.0

1 35 7.5 3 1 NA

10 350 75 30 10 NA

100 NA 750 300 100 NA

1000 NA NA NA 1000 7

10000 NA NA NA 10000 70

100000 NA NA NA 100000 700

Air Cleanliness Standard for China's Pharmaceutical Production Cleanroom (District)

Cleanliness Class Dust Maximum Allowable/Millimeter Microbes Maximum Allowable

≥ 0.5um 5um planktonic bacteria / cubic meters sedimentation bacteria / dish 30min

100 3500 0 5 1

10000 350000 2000 100 3

100000 3500000 20000 500 10

300000 10500000 61800 NA 15

Cleanliness Grade of Suspended Particles in Air in Clean Room and Clean Area GB50073-2001

Air cleanliness level (N) is greater than or equal to the maximum particle size limit in the table (pc/m3)

0.1μm 0.2μm 0.3μm 0.5μm 1μm 5μm

1 10 2

2 100 24 10 4

3 1000 237 102 35 8

4 10000 2370 1020 352 83

5 100000 23700 10200 3520 832 29

6 1000000 237000 102000 35200 8320 293

7 352000 83200 2930

8 3520000 832000 29300

9 35200000 8320000 293000

Third, clean room standard - control of the project

1. It can remove dust particles floating in the air.

2. It can prevent the generation of fine dust particles.

3. Temperature and humidity control.

4. Adjustment of pressure.

5. Excluding harmful gases.

6. The tightness of structures and compartments.

7. Prevention of static electricity.

8. Electromagnetic interference prevention.

9. Security considerations.

10. Energy saving considerations.

Fourth, dust-free workshop standard - classification

1. Turbulent Flow:

The air enters the clean room from the air conditioning box through the air duct and the air filter (HEPA) in the clean room, and is returned by the partition walls or the elevated floor on both sides of the clean room. The air flow is non-linear and irregularly turbulent or turbulent. This type is suitable for clean room grades of 1,000-100,000.

Advantages: Simple structure, low system construction cost, and easy expansion of the clean room. In some special-purpose places, dust-free worktables can be used to improve the dust-free workshop level.

Disadvantages: Dust particles caused by turbulent flow floating in the indoor space is not easy to discharge, easy to pollute the process products. In addition, if the system is shut down and then activated, the desire for cleanliness of the demand will often take a long time.

2. Laminar:

The laminar air flow moves into a uniform linear shape. The air enters the room with a filter with a coverage of 100%, and is returned by the raised floor or the side wall panels. This type is suitable for use in environments where the clean room level is in high demand. In general, its cleanroom class is Class 1~100. Its type can be divided into two kinds:

(1) Horizontal laminar flow in a dust-free shop: Horizontal air is blown out in one direction from the filter, and the air is returned from the air return system on the opposite side wall. The dust is discharged to the outside with the wind direction, and the pollution is generally serious on the downstream side.

Advantages: simple structure, can become stable within a short time after operation.

Disadvantages: The construction cost is higher than the turbulent flow type, and the indoor space is not easy to expand.

(2) Clean-laid vertical laminar flow: The ceiling of the room is completely covered with ULPA filter, and the air is blown from top to bottom to obtain a higher degree of cleanliness. The dust generated during the process or by the staff can be rapidly discharged outdoors. Does not affect other work areas.

Advantages: Easy to manage, the stable state can be achieved within a short time after the start of operation, and it is not easy to affect the working state or the operator.

Disadvantages: higher construction costs, the use of flexible space, ceiling hangers occupy a lot of space, maintenance and replacement of filters is more troublesome.

3. Mixed Type:

The compound type is to combine turbulent flow and laminar flow in combination or in combination to provide locally super clean air.

(1) Clean tunnel Clean tunnel: The HEPA or ULPA filter covers 100% of the process area or work area to improve the cleanliness level to more than 10, which can save installation and operation costs. This type needs to isolate the working area of ​​the operator from the maintenance of the product and the machine to avoid affecting the work and quality when the machine is repaired. The ULSI process mostly adopts this type. The clean tunnel has two other advantages: A. It is easy to expand elastically; B. It can be easily performed in the maintenance area when maintaining the equipment.

(2) Clean Tube Clean Tube: Encloses and purifies the automatic production line through which the product flow passes, and raises the cleanliness level to over 100 levels. Because the product, the operator, and the dust emission environment are isolated from each other, a small amount of air can be provided with good cleanliness, which can save energy, and no manual automated production line is the most suitable for use. The pharmaceutical, food industry and semiconductor industries all apply.

(3) Clean-spot installation of a clean spot: The cleanliness level of the product processing area in a turbulent clean room with a clean room class of 10,000 to 100,000 is increased to a level of 10 to 1,000 or more for use in production; ie This is the class.

Clean bench: Class Class 1~100.

Clean work shed: To form a small space with a transparent plastic cloth with static electricity prevention in the turbulent clean room space, and to use a separate HEPA or ULPA and air-conditioning blower unit to become a higher level clean room with a rating of 10 ~1000 grade, height of about 2.5 meters, covering an area of ​​about 10M2 or less, four pillars and installation of movable wheels, can be used flexibly.

Five, clean room standard - flow of air

The cleanliness of a cleanroom is often affected by airflow. In other words, the movement and diffusion of dust generated by people, machine compartments, building structures, etc. are governed by airflow.

The dust-free plant uses HEPA and ULPA to filter air, and its dust collection rate is as high as 99.97 to 99.99995%. Therefore, the air filtered by this filter can be said to be very clean. However, in addition to people, the clean room is still a dust source such as a machine. Once these dusts are diffused, they cannot maintain a clean space. Therefore, the dust generated by the air flow must be quickly discharged to the outside.

The air flow in the clean room is an important factor in the performance of the clean room. Generally, the air speed of the clean room is selected between 0.25~0.5m/s. This air speed is in the breeze area and is easily disturbed by humans, machines, etc. It tends to be chaotic. Although increasing the wind speed can suppress the impact of this disruption and maintain cleanliness, the increase in wind speed will affect the increase in running costs. Therefore, it should be possible to achieve the optimum wind speed at the required level of cleanliness. Supply to achieve the appropriate wind speed to achieve economical results.

On the other hand, to achieve a stable effect of the cleanliness of the clean room, the maintenance of the uniform air flow is also an important factor. If the uniform air flow cannot be maintained, it means that the wind speed is different. Especially on the wall surface, the air flow will cause vortex flow along the wall surface. It is actually very difficult to achieve high cleanliness.

In a clean room, to maintain a uniform airflow in the direction of the vertical laminar flow, (a) there must be no speed difference in the speed of the blowing surface, and (b) there must be no speed difference in the speed of the suction surface of the floor return plate. The speed is too low or too high (0.2m/s, 0.7m/s), eddy current phenomenon occurs, and 0.5m/s speed, the airflow is more uniform, the current general clean room, the wind speed is taken in the 0.25~0.5 Between m/s.

There are many factors affecting clean room air flow, such as process equipment, personnel, clean room assembly materials, lighting equipment, etc. At the same time, the diversion points of airflow above the production equipment should also be considered.

The air flow diversion point on the surface of the general operation table or production equipment should be set at a distance of 2/3 between the clean room space and the partition wall board. This allows the operator to work and the airflow can flow from the inside of the process area to the work area. Dust is carried away; if the diversion point is located in front of the process area, it will become an improper airflow diversion. After most of the air flow will flow to the process area, the dust caused by the operator's operation will be brought behind the equipment. Taiwan will thus be contaminated and the yield will inevitably fall.

Obstructions such as work tables in a clean room will have eddy currents at the junctions, relatively poor cleanliness in the vicinity, and drilling a return hole at the work table will minimize eddy currents. Whether the selection of assembly materials is appropriate and whether the equipment is terribly perfected is also an important factor in whether the air flow becomes an eddy current phenomenon.

Sixth, clean room standard - constitute

The composition of the clean room is composed of the following systems (indispensable for the constituent system molecules), otherwise it will not constitute a complete and good quality clean room.

(1) Ceiling system: Ceiling rod, I-Beam or U-Beam, Ceiling grid or Ceiling frame.

(2) Air conditioning system: including air cabin, filter system, windmill, etc.

(3) Partitional wall: Including windows, doors.

(4) Floor: Including raised floor or anti-static Shumei floor.

(5) Lighting: Including fluorescent lamps, yellow lamps, etc.

The main construction of the clean room is generally made of double-coated sandwich color steel plates. However, no matter what the structure, the following conditions must be satisfied: A. No cracks will occur due to temperature changes and vibrations; B. Difficult to produce fine dust Particles, and it is difficult to attach particles; C. Low moisture absorption; D. To maintain the humidity conditions in the room, high thermal insulation

Clean room standard: design and construction are strictly in accordance with professional standards such as "ISO/DIS14644-1 International Standard", "GB50073-2001 Cleanroom Installation Design Specification", "JGJ71-90 Cleanroom Assembly Installation and Acceptance Specifications", etc. ISO9002 international quality system for the purpose of purification engineering design, production, installation, commissioning of the one-stop service to meet the different industries for purification, air conditioning, aseptic, lighting, electrical and decorative needs. And to undertake external air-conditioning water system installation, distribution system installation.

Zhejiang Sujing Purification Equipment Co., Ltd. is located in Daoshui Town, Shangyu District, Shaoxing City, Zhejiang Province. It is an excellent manufacturer in the purification equipment industry in East China. Can provide professional air purification systems for industries such as microelectronics, biomedicine, hospital operating rooms, fiber optic cables, food and beverages, precision instruments, semiconductors, and new material applications in accordance with the ISO14644-1 standard, GB50073-2001 national standard, and national GMP specifications. Engineering design, construction, testing and technical services.
The company's main purification table series, air shower series, fume hood series, biological safety cabinet series are widely used in medical and health, electronics, pharmaceuticals, biology, food, agriculture, forestry, animal husbandry and veterinary, inspection and quarantine, aerospace, automotive manufacturing, Precision instruments, universities and research institutes enjoy a high reputation in the domestic and Southeast Asian markets.
Zhejiang Sujing Purifying Equipment Co., Ltd. is dedicated to serving consumers and distributors all over the world. We will provide you with the best quality products, the most humane services and the lowest price. We sincerely welcome you to join us!

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